“Evaluation of electron scattering in high-resolution x-ray mask fabrication”

Chapter

Publication Date:

1993

Short description:

“Evaluation of electron scattering in high-resolution x-ray mask fabrication” / A., Paoletti; Santangelo, Saveria; A., Tucciarone; Messina, Giacomo. - (1993), pp. 497-504. ( Eurosim Conference, Eurosim '92 Capri, Italy, 28 September-4 October, 1992).

Iris type:

2.1 Contributo in volume (Capitolo o Saggio)

List of contributors:

A., Paoletti; Santangelo, Saveria; A., Tucciarone; Messina, Giacomo

Authors of the University:

MESSINA Giacomo

SANTANGELO Saveria

Handle:

https://iris.unirc.it/handle/20.500.12318/13380

Book title:

Eurosim '92: Simulation Congress : Proceedings of the 1992 Eurosim Conference, Eurosim '92, Capri, Italy, 28 September-4 October, 1992