Evidence for the existence of scaling laws correlating the deposition parameters and the Raman spectra features in thin a-C:N:H films deposited by reactive r.f. sputtering

Evidence for the existence of scaling laws correlating the deposition parameters and the Raman spectra features in thin a-C:N:H films deposited by reactive r.f. sputtering / Messina, G., Santangelo, S., Fanchini, G., Tagliaferro, A.. - In: VACUUM. - ISSN 0042-207X. - 67:(2002), pp. 537-542. [10.1016/S0042-207X(02)00245-2]