Evidence for the existence of scaling laws correlating the deposition parameters and the Raman spectra features in thin a-C:N:H films deposited by reactive r.f. sputtering

Academic Article

Publication Date:

2002

Short description:

Evidence for the existence of scaling laws correlating the deposition parameters and the Raman spectra features in thin a-C:N:H films deposited by reactive r.f. sputtering / Messina, G., Santangelo, S., Fanchini, G., Tagliaferro, A.. - In: VACUUM. - ISSN 0042-207X. - 67:(2002), pp. 537-542. [10.1016/S0042-207X(02)00245-2]

Iris type:

1.1 Articolo in rivista

List of contributors:

Messina, G.; Santangelo, Saveria; Fanchini, G.; Tagliaferro, A.

Authors of the University:

MESSINA Giacomo

SANTANGELO Saveria

Handle:

https://iris.unirc.it/handle/20.500.12318/4065

Published in:

VACUUM

Journal