Perspectives in electron scattering by microstructures

Articolo

Data di Pubblicazione:

1993

Citazione:

Perspectives in electron scattering by microstructures / Messina, G., Paoletti, A., Santangelo, S., Tucciarone, A.. - In: IL NUOVO CIMENTO DELLA SOCIETÀ ITALIANA DI FISICA. B, GENERAL PHYSICS, RELATIVITY, ASTRONOMY AND MATHEMATICAL PHYSICS AND METHODS. - ISSN 1594-9982. - D15:2-3(1993), pp. 531-539. [10.1007/BF02456936]

Abstract:

In this paper the physical mechanisms of electron scattering in solids are studied, emphasis being placed on the processes relevant in electron spectroscopy and lithography. The essential features of the Monte Carlo approach to electron penetration are reviewed. Lithography applications are briefly discussed.

Tipologia CRIS:

1.1 Articolo in rivista

Elenco autori: