Data di Pubblicazione:
2017
Citazione:
Electrostatic Field in Terms of Geometric Curvature in Membrane MEMS Devices / Di Barba, P., Versaci, M., Fattorusso, L.A.M.. - In: COMMUNICATIONS IN APPLIED AND INDUSTRIAL MATHEMATICS. - ISSN 2038-0909. - 8:1(2017), pp. 165-184. [10.1515/caim-2017-0009]
Abstract:
In this paper we present, in a framework of 1D-membrane Micro-Electro-Mechanical- Systems (MEMS) theory, a formalization of the problem of existence and uniqueness of a solution related to the membrane deformation u for electrostatic actuation in the steady-state case. In particular, we propose a new model in which the electric eld magnitude E is proportional to the curvature of the membrane and, for it, we obtain results of existence by Schauder-Tychonoff's fixed point application and subsequently we establish conditions of uniqueness. Finally, some numerical tests have been carried out to further support the analytical results.
Tipologia CRIS:
1.1 Articolo in rivista
Keywords:
MEMS; Electrostatic Attuation; BOUNDARY SEMI-LINEAR; Green Function; Fixed-Point Theorems
Elenco autori:
Di Barba, P; Versaci, Mario; Fattorusso, Luisa Angela Maria
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