Document
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Aid of scaling laws in the achievement a well-controlled film deposition process
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type: Chapter
language: Inglese
type: Entity
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related by: 724833
related by: 724832
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RDF description of Aid of scaling laws in the achievement a well-controlled film deposition process - http://irises.unirc.it/resource/item/12165
rights: termsOfUse
date: 2026-08-27T01:54:52
publisher: Aid of scaling laws in the achievement a well-controlled film deposition process
type: Document

Continuant
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Inglese
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Entity
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Generically Dependent Continuant
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Book Section
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document part
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label: Document Part

724832
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relates: Aid of scaling laws in the achievement a well-controlled film deposition process

724833
type: Entity
type: BFO_0000020
type: Authorship
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relates: Aid of scaling laws in the achievement a well-controlled film deposition process

Information Content Entity
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Chapter
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